CMC Research Live Streaming Seminar Fundamentals and Applications of ALD (Atomic Layer Deposition) / ALE (Atomic Layer Etching) Technology Held February 20 (Monday) Sponsored by CMC Research Co., Ltd.

CMC Research
[Live Streaming Seminar] Fundamentals and Applications of ALD (Atomic Layer Deposition) / ALE (Atomic Layer Etching) Technology Held on February 20 (Monday) Sponsored by: CMC Research Co., Ltd.
This seminar will be a webinar (live distribution seminar) using the video conferencing tool “Zoom” on the day.

CMC Research Co., Ltd. (Nishiki-cho, Kanda, Chiyoda-ku:
https://cmcre.com/), which provides cutting-edge technology and market information, holds seminars on market trends and technology trends for various materials and chemicals. We are publishing books, and this time we will hold a seminar titled “Basics and Applications of ALD (Atomic Layer Deposition) / ALE (Atomic Layer Etching) Technology” by Mr. Yukiharu Uraoka, Nara Institute of Science and Technology Materials Creation Professor of the Graduate School of Science) will be invited, and will be held live via ZOOM from 10:00 on February 20, 2023 (Monday). The tuition fee is 55,000 yen (tax included) for the general public, 49,500 yen (tax included) for members of our e-mail magazine, and 26,400 yen (tax included) for the academic price (including materials).
For more information and to apply for the seminar, please visit our URL below!  https://cmcre.com/archives/107000/
There will be time for Q&A, so please feel free to join us.
Forming high-performance thin films is extremely important in semiconductor processing technology, which supports the progress of IoT technologies such as AI and 5G. Various thin-film formation techniques have been developed over the years, and have been widely used in the electronics field, such as LSIs, displays, and solar cells.
In this seminar, we will outline the basics and applications of ALD (Atomic Layer Deposition)/ALE (Atomic Layer Etching) technologies, which have received particular attention in recent years. In particular, the principles of deposition and materials will be introduced in detail. We will also introduce the features and issues when applied to LSIs, thin film transistors, and power devices. 1) Seminar theme and date
Theme: Fundamentals and Applications of ALD (Atomic Layer Deposition) / ALE (Atomic Layer Etching) Technology
Date and time: February 20, 2023 (Monday) 10: 00-16: 00
Participation fee: 55,000 yen (tax included) *with materials * 49,500 yen (tax included) for mail magazine subscribers
*Academic price is 26,400 yen (tax included)
Lecturer: Yukiharu Uraoka Professor, Graduate School of Materials Science, Nara Institute of Science and Technology
[Knowledge gained from the seminar]
・ General semiconductor process technology (especially ALD technology) ・ Semiconductor device technology (especially MOS devices)
・ Semiconductor material evaluation technology (electrical/chemical/physical) *This seminar will be a live distribution seminar using the video conferencing tool “Zoom” on the day. Please refer to the tool for the recommended environment. At a later date, we will send you a separate email with the URL for viewing.
★Recording or filming during the course is strictly prohibited. 2) How to apply
CMC Research seminar site
https://cmcre.com/archives/107000/
Please apply from
We will send you a separate email with the viewing URL.
Please see the URL for details.
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3) Introduction of seminar program
1. Fundamentals of thin film formation technology
1.1 Basics of thin film fabrication
 1.2 Thin film evaluation method
1.2.1 Electrical evaluation
1.2.2 Chemical analysis method
1.2.3 Optical evaluation method
2. Fundamentals of ALD technology
 2.1 Principle of ALD technology
 2.2 Features of ALD thin film
 2.3 History of ALD technology
 2.4 Mechanism of ALD equipment
 2.5 Materials for ALD technology
3. Application of ALD technology
 3.1 Application to power devices
 3.2 Application to oxide thin film transistors
 3.3 Application to MOS LSI
4. Fundamentals of ALE technology
4.1 History of ALE
 4.2 ALE principle
5. Application Examples of ALE Technology
 3.1 Application to semiconductor materials such as silicon and gallium nitride  3.2 Application to insulating films such as silicon oxide films and nitride films
 3.3 Application to metal films such as Co
6. Challenges and Prospects of ALD/ALE Technology
4) Instructor introduction
[Lecturer Career]
March 1985 Graduated from Toyohashi University of Technology April 1985 Matsushita Electric Industrial Co., Ltd. Semiconductor Research Center
April 1996 Matsushita Electric Industrial Co., Ltd. Liquid Crystal Development Center
April 1999 Associate Professor, Graduate School of Materials Science, Nara Institute of Science and Technology
April 2009 Professor, Graduate School of Materials Science, Nara Institute of Science and Technology
[Activities]
1. The Japan Society of Applied Physics Fellow
2. IEEE Senior Member
3. IEEE/AMFPD International Conference Executive Committee Chair 4. JJAP/APEX Deputy Editor-in-Chief
5. CMC Publishing “Development of Low-Temperature Polysilicon Transistors” 6. Intelligent Nanosystems for Energy, Information and Biological Technologies (ISBN:978-4-431-56427-0 (Print) 978-4-431-56429-4 (Online))
5) Seminar target audience and benefits
* This seminar will be a live distribution seminar using the video conferencing tool “Zoom” on the day. Please refer to the tool for the recommended environment. At a later date, we will send you a separate email with the URL for viewing.
★ Recording or filming during the course is strictly prohibited. [Seminar Target]
・Semiconductor process/device engineers/students/faculties/business people/research planners
☆ Click here for details and application ↓
https://cmcre.com/archives/107000/
6) Information on webinars (online distribution seminars)
○Recycled plastic degradation/destruction mechanism and lifetime prediction Date and time: Friday, January 27, 2023, 10:30-16:30
 https://cmcre.com/archives/99615/
○Fundamentals of optical films for displays and their application to new displays
Date and time: Friday, January 27, 2023, 13:30-16:30
 https://cmcre.com/archives/105369/
○Recycled plastic degradation/destruction mechanism and lifetime prediction Date and time: Friday, January 27, 2023, 10:30-16:30
 https://cmcre.com/archives/99615/
○Fundamentals of optical films for displays and their application to new displays
Date and time: Friday, January 27, 2023, 13:30-16:30
 https://cmcre.com/archives/105369/
○ Development of rare metal recovery technology using microbial function Date and time: Monday, January 30, 2023, 13:30-16:30
https://cmcre.com/archives/107063/
○ Introduction to inkjet technology
Date and time: January 30, 2023 (Monday) 10:30-16:30
https://cmcre.com/archives/106028/
○ Know-how for scaling up the separation process to industrial equipment Date and time: Monday, January 30, 2023, 13:30-16:30
https://cmcre.com/archives/107370/
○Forefront of organic thermoelectric elements
Date and time: Tuesday, January 31, 2023, 13:30-16:30
 https://cmcre.com/archives/106237/
○ Remaining capacity estimation and deterioration diagnosis technology for reuse of lithium-ion batteries
Date and time: Tuesday, January 31, 2023, 13:30-16:30
 https://cmcre.com/archives/107312/
○Bioreactors for culturing microorganisms and animal/plant cells: basics of design and scale-up
Date and time: February 1, 2023 (Wednesday) 10:30-16:30
 https://cmcre.com/archives/103678/
○Technology for manufacturing liquid fuels, general-purpose chemicals, and functional substances using microorganisms
Date and time: February 1, 2023 (Wednesday) 13:30-16:30
 https://cmcre.com/archives/104181/
○ Fundamentals and applications of mechanochemistry by pulverization Date and time: February 1, 2023 (Wednesday) 13:30-16:30
 https://cmcre.com/archives/102390/
○Fundamentals of high-frequency printed circuit board technology and required materials and processes
Date and time: February 2, 2023 (Thursday) 13:00-16:30
 https://cmcre.com/archives/105305/
○Fundamentals and applications of surface treatment technology Date and time: February 2, 2023 (Thursday) 10:00-17:00
 https://cmcre.com/archives/100205/
○ Noise/vibration reduction technology and material application methods Date and time: February 3, 2023 (Friday) 13:30-16:30
 https://cmcre.com/archives/106082/
○Development of urethane-carbonate polymer materials using carbon dioxide and carbon disulfide
Date and time: February 3, 2023 (Friday) 13:30-16:30
 https://cmcre.com/archives/106108/
○General knowledge of epoxy resins and recycling technology
Date and time: February 3, 2023 (Friday) 10:30-16:30
 https://cmcre.com/archives/106408/
○I understand! Basic and Practical Lectures on Isolation, Culture, and Identification of Microorganisms for Food Quality Inspection Personnel Date and time: Tuesday, February 7, 2023, 13:30-16:30
 https://cmcre.com/archives/100659/
○Experimental methods and data utilization in the DX era
Date and time: February 7, 2023 (Tuesday) 10:30-16:30
 https://cmcre.com/archives/106055/
☆ Click here for a list of upcoming webinars! ↓
https://cmcre.com/archives/category/cmc_all/
7) Information on related books
(1) Everything about oxide semiconductor thin film technology (2nd) https://cmcre.com/archives/59113/
■ Issued: April 30, 2020
■ Author: Ikuhiro Ukai
■ List price: 60,000 yen (66,000 yen including tax)
★ E-mail magazine members: 10% off list price!
■ Appearance: A4 size, standard product, text 161 pages, color ■ Edited and published by CMC Research Co., Ltd.
ISBN 978-4-904482-77-3
↓ Click here for details and purchase
https://cmcre.com/archives/59113/
(2) All about oxide semiconductor thin film technology
https://cmcre.com/archives/52376/
■ Issued: October 10, 2019
■ Author: Ikuhiro Ukai
■ Regular price: 70,000 yen (77,000 yen including tax)
*April 30, 2020, along with the second issue
The list price of 99,000 yen (tax included) has been reduced. ★ E-mail magazine members: 10% off the list price!
■ Appearance: A4 size, standard product, text 205 pages, color ■ Edited and published by CMC Research Co., Ltd.
ISBN 978-4-904482-66-7
↓ Click here for details and purchase
https://cmcre.com/archives/52376/
☆ Click here for a list of published books ↓
https://cmcre.com/archives/category/cmc_all/
☆ Notice of customer appreciation sale!
We will offer the target books at a special price of 20 to 50% discount! Sale period: December 7, 2022 (Wednesday) to March 3, 2023 (Friday) Click here for the list of target books ↓
https://cmcre.com/archives/106377/
that’s all
Details about this release:
https://prtimes.jp/main/html/rd/p/000002224.000012580.html

MAIL:cr@prtimes.co.jp

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