[Toyo Technica] Launch of new Xe plasma FIB-SEM “AMBER X 2”
*Toyo Technica*
Press release: September 3, 2024
**
Launch of new Xe plasma FIB-SEM “AMBER X 2”
*In addition to improving processing performance for large-area processing, AI technology realizes complete automation of TEM sample preparation*
New Xe plasma FIB-SEM “AMBER X 2”
Toyo Technica Co., Ltd. (Headquarters: Chuo-ku, Tokyo, President and CEO: Toshiya Kono, hereinafter referred to as Toyo Technica) is a subsidiary of TESCAN GROUP, a.s.
We will be selling the new Xe plasma FIB-SEM “AMBER “AMBER
2” is equipped with a new FIB column (*1), which not only further improves the throughput of large-area processing, which is a feature of plasma FIB, but also fully automates the preparation of TEM samples (*2), which requires skilled techniques. Equipped with AI technology to do this. This will contribute to the development of a variety of materials such as electronic devices, lithium-ion batteries, soft materials, and magnetic materials.
This product will be exhibited and introduced for the first time in Japan at “JASIS 2024”, which will be held from Wednesday, September 4, 2024.
* [Summary/Background] *
FIB-SEM(Focused Ion Beam Scanning Electron
Microscope) is an analysis system that integrates a FIB (focused ion beam device) that can process cross-sections of microscopic areas and an SEM (electron microscope) that can perform high-resolution observation. It is used to confirm the internal structure and cross-sectional structure of samples when developing high-performance materials and electronic devices or investigating the cause of defects. In recent years, there has been a wide variety of materials that need to be analyzed, and the scope of analysis has also expanded, so in addition to high-precision processing and observation
techniques, further improvements in work efficiency are required. “AMBER X” handled by Toyo Technica
2″ is equipped with a column that improves the high current
performance of FIB, making it possible to process targeted areas at high speed even on large areas with nanometer-order positional accuracy. In addition, for the preparation of TEM samples for analysis, we have developed fully automated software using AI technology to create high-quality samples without the Ga ion implantation and contamination seen in FIBs that utilize conventional Ga (gallium) ion beams. Enables the preparation of TEM samples. Until now, TEM sample preparation involved many steps and it took time to master the skills, but with this fully automatic software using AI technology, it is now possible to easily prepare samples without relying on skills. It will be. With this system, it is possible to further improve processing performance and make sample preparation more efficient.
*1 FIB column: A mechanism that narrowly focuses the ion beam extracted from the ion source and scans it to irradiate the sample. *2 TEM sample: Sample used for transmission electron microscope
* [Main features of Xe plasma FIB-SEM “AMBER X 2”] *
・Composite system that integrates FIB and SEM using Xe (xenon) plasma as an ion source
・With high beam current (maximum 3.3μA) of plasma Xe ions, FIB cross-section processing of large area (maximum 1mm width) is possible.
Realized at high speed
– Easy micro-machining of targeted locations with nanometer-order positioning accuracy
・Ga-free sample preparation allows analysis without damaging the sample
・Product catalog download page (membership registration required): https://www.toyo.co.jp/microscopy/catalog/list/?contents_type=2830&c1=979&l=2
* [Exhibition overview] *
◆ Exhibition name: JASIS 2024
◆ Dates: Wednesday, September 4, 2024 – Friday, September 6, 2024 10:00-17:00 ◆ Location/Booth number: Makuhari Messe (Hall 5/5B-301)
◆ Official website: https://www.jasis.jp/
* -About Toyo Technica Co., Ltd.-*
Toyo Technica, 1953
Since our establishment in 2013, we have contributed to technological innovation as a leading company in cutting-edge “measurement” technology. Our business fields are diverse, including information and communications, automobiles, energy, EMC (electromagnetic
compatibility), marine, software development, life science, and security. 5G
In addition to providing the latest technology in trending fields such as the spread of communications, clean energy, and the development of self-driving cars, we are also focusing on developing our own products that take advantage of our unique measurement technology, and expanding our business both domestically and internationally. By providing the latest solutions, we will contribute to the creation of a safe and environmentally friendly society and the development of industry.
* Toyo Technica Co., Ltd. website: * * https://www.toyo.co.jp/*